发明授权
US06030717A Multilayer antireflection coatings for grazing ultraviolet incident light 失效
用于放射紫外线入射光的多层抗反射涂层

Multilayer antireflection coatings for grazing ultraviolet incident light
摘要:
Multilayer antireflection coatings are disclosed for grazing incident ultraviolet light having a large angle of incidence. The coatings comprise, from the medium side, layers of high-refractive-index material alternating with layers of low-refractive-index material. Each layer of the high-refractive-index material has the same optical thickness, and each layer of the low-refractive-index material has the same optical thickness. The multilayer antireflection coatings are effective in preventing reflection of p-polarized light, from optical elements coated with such a coating, having a wavelength of 150 nm.ltoreq..lambda..ltoreq.250 nm in a range of angle of incidence of 70.degree..ltoreq..theta..ltoreq.80.degree..
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