发明授权
US06030717A Multilayer antireflection coatings for grazing ultraviolet incident light
失效
用于放射紫外线入射光的多层抗反射涂层
- 专利标题: Multilayer antireflection coatings for grazing ultraviolet incident light
- 专利标题(中): 用于放射紫外线入射光的多层抗反射涂层
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申请号: US12125申请日: 1998-01-22
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公开(公告)号: US06030717A公开(公告)日: 2000-02-29
- 发明人: Hiroshi Nakamura , Takeshi Shirai
- 申请人: Hiroshi Nakamura , Takeshi Shirai
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX9-010552 19970123; JPX9-230000 19970826
- 主分类号: G02B1/11
- IPC分类号: G02B1/11 ; B32B7/02 ; B32B9/00 ; C03C17/34 ; G02B1/115 ; G02B5/30
摘要:
Multilayer antireflection coatings are disclosed for grazing incident ultraviolet light having a large angle of incidence. The coatings comprise, from the medium side, layers of high-refractive-index material alternating with layers of low-refractive-index material. Each layer of the high-refractive-index material has the same optical thickness, and each layer of the low-refractive-index material has the same optical thickness. The multilayer antireflection coatings are effective in preventing reflection of p-polarized light, from optical elements coated with such a coating, having a wavelength of 150 nm.ltoreq..lambda..ltoreq.250 nm in a range of angle of incidence of 70.degree..ltoreq..theta..ltoreq.80.degree..
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