发明授权
- 专利标题： Ultra-high vacuum apparatus
- 专利标题（中）： 超高真空装置
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申请号： US339300申请日： 1999-06-24
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公开(公告)号： US6031235A公开(公告)日： 2000-02-29
- 发明人: Yasuhiko Ishida , Minoru Hiroki , Toshiaki Kobari , Osamu Satou , Yasushi Nakaizumi , Akimitsu Okura , Hideiti Kimura
- 申请人： Yasuhiko Ishida , Minoru Hiroki , Toshiaki Kobari , Osamu Satou , Yasushi Nakaizumi , Akimitsu Okura , Hideiti Kimura
- 申请人地址： JPX Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX4-219587 19920728
- 主分类号： C09K3/10
- IPC分类号： C09K3/10 ; F16J15/10 ; F16K51/02 ; G01N23/00
摘要：
A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1% and less and an outgassing rate of 2.times.10.sup.-6 (Torr.multidot.l/sec/cm.sup.2 :at 200.degree. C.) and less.
公开/授权文献
- US5428458A Image communicating apparatus 公开/授权日：1995-06-27
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