发明授权
- 专利标题: Field emission charge controlled mirror (FEA-CCM)
- 专利标题(中): 场发射电荷控制镜(FEA-CCM)
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申请号: US172612申请日: 1998-10-15
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公开(公告)号: US6034810A公开(公告)日: 2000-03-07
- 发明人: William P. Robinson , Michael J. Little , Eric A. Gifford
- 申请人: William P. Robinson , Michael J. Little , Eric A. Gifford
- 申请人地址: CA Westlake Village
- 专利权人: MEMSolutions, Inc.
- 当前专利权人: MEMSolutions, Inc.
- 当前专利权人地址: CA Westlake Village
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; G02B26/08 ; G09G3/22 ; H01J31/12 ; H04N5/68 ; H04N5/74 ; G02B26/02
摘要:
A bright, high contrast, compact, large area, high-resolution light modulator uses a field emitter array (FEA) to address a charge controlled mirror (CCM). The FEA deposits a charge pattern onto the CCM, which in turn produces electrostatic forces that deflect the micromirrors in accordance with the amount of accumulated charge. The CCM that is used in combination with the FEA can be configured in many different ways to implement different actuation modes, e.g. attractive, repulsive, grid-actuated or membrane-actuated and different charge control modes, e.g. RC decay, RC sustain and charge control.
公开/授权文献
- US5385085A Multiple unit wok apparatus 公开/授权日:1995-01-31
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