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公开(公告)号：US5991066A
公开(公告)日：1999-11-23
申请号：US172613
申请日：1998-10-15
CPC分类号： G02B26/0841
摘要： An electrostatically actuated micromirror light modulator that exhibits increased deflection range, better charge efficiency and improved electrostatic stability. A thin insulating membrane decouples the electron beam from the micromirror array inside the vacuum cell. The membrane is just thick enough to stop the incident electrons from penetrating through to the mirrors but is thin enough to maintain resolution of the deposited charge pattern. An equipotential layer beneath the mirror array prevents any attractive force from being developed due to the accumulation of static charge on the surface of the light modulator that may otherwise cause the mirror to snap-over and become stuck to the substrate.
摘要翻译： 具有增加的偏转范围，更好的充电效率和改进的静电稳定性的静电致动微镜光调制器。 电绝缘膜将真空电池内的微镜阵列的电子束去耦。 膜刚刚足够大以阻止入射的电子穿透到反射镜，但是足够薄以保持沉积的电荷图案的分辨率。 在镜阵列下方的等电位层防止由于光调制器表面上的静电荷的累积而引起的任何吸引力，否则可能导致镜子卡扣并粘附到基底上。
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公开(公告)号：US06329967B1
公开(公告)日：2001-12-11
申请号：US09466886
申请日：1999-12-20
IPC分类号： G09G320
CPC分类号： G02B26/0841 , G02B26/02 , G09G3/3433
摘要： A thin low power, paper white, direct-view display includes an array of bistable micromirrors that are deflected between two stable states, a dark state in which the mirror covers a portion of the background and a white state in which the mirror uncovers the background. The drive electronics are similar to those used in multiplexed LDCs but are modified in order to drive the micromirrors to one of their two stable states. The micromirrors in the enabled row are attracted up or down with sufficient force to exceed the micromirrors' bistable threshold and deflect the micromirrors to their dark and white states, respectively. The attractive forces on the micromirrors in the remaining non-enabled rows are insufficient to exceed the micromirrors' bistable threshold so that the micromirrors remain in their current stable state.
摘要翻译： 薄的低功率纸白色直视显示器包括在两个稳定状态之间偏转的双稳态微镜阵列，其中镜子覆盖背景的一部分的暗状态和反射镜揭示背景的白色状态 。 驱动电子设备类似于多路复用最不发达国家中使用的驱动电路，但是为了将微镜驱动到它们两个稳定状态之一进行了修改。 启用行中的微镜分别以足够的力向上或向下吸引，以超过微镜的双稳态阈值，并将微镜分别偏转到其暗和白色状态。 剩余的非启用行中的微镜上的吸引力不足以超过微镜的双稳态阈值，使得微镜保持在其当前的稳定状态。
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公开(公告)号：US6034810A
公开(公告)日：2000-03-07
申请号：US172612
申请日：1998-10-15
CPC分类号： G02B26/0841 , H04N5/7458
摘要： A bright, high contrast, compact, large area, high-resolution light modulator uses a field emitter array (FEA) to address a charge controlled mirror (CCM). The FEA deposits a charge pattern onto the CCM, which in turn produces electrostatic forces that deflect the micromirrors in accordance with the amount of accumulated charge. The CCM that is used in combination with the FEA can be configured in many different ways to implement different actuation modes, e.g. attractive, repulsive, grid-actuated or membrane-actuated and different charge control modes, e.g. RC decay, RC sustain and charge control.
摘要翻译： 明亮，高对比度，紧凑，大面积的高分辨率光调制器使用场致发射阵列（FEA）来寻址电荷控制镜（CCM）。 FEA将电荷模式放置在CCM上，CCM又产生根据累积电荷的量使微镜偏转的静电力。 与FEA组合使用的CCM可以以许多不同的方式配置以实现不同的致动模式，例如， 有吸引力的，排斥的，栅格驱动的或膜致动的和不同的电荷控制模式，例如 RC衰减，RC持续和充电控制。
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公开(公告)号：US6038058A
公开(公告)日：2000-03-14
申请号：US172614
申请日：1998-10-15
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A micromirror light valve target configuration that overcomes the problems of limited deflection range, electrostatic and resolution by forming the secondary electron collector grid of a fine conductive mesh and placing it in close proximity to the micromirror array. The source, preferably a fixed beam array, addresses the micromirror array such that it exhibits a secondary emission coefficient less than one to write a negative charge pattern onto the mirrors so that they are attracted to the collector grid. If the anode is also in close proximity to the array, the mirrors can be addressed so that they deflect up toward the grid and down toward the anode thereby increasing the deflection range.
摘要翻译： 一种微镜光阀目标结构，其通过形成精细导电网的二次电子收集器栅格并将其放置在微镜阵列附近来克服有限偏转范围，静电和分辨率的问题。 源，优选地是固定光束阵列，寻址微镜阵列，使得其表现出小于1的二次发射系数，以将负电荷图案写入反射镜，使得它们被吸引到集电极栅极。 如果阳极也非常靠近阵列，则反射镜可以被寻址，使得它们朝向栅极偏转并向下朝向阳极，从而增加偏转范围。
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公开(公告)号：US6034807A
公开(公告)日：2000-03-07
申请号：US179750
申请日：1998-10-28
CPC分类号： G02B26/0841 , G02B26/02 , G09G3/3433
摘要： A thin low power, paper white, direct-view display includes an array of bistable micromirrors that are deflected between two stable states, a dark state in which the mirror covers a portion of the background and a white state in which the mirror uncovers the background. The drive electronics are similar to those used in multiplexed LCDs but are modified in order to drive the micromirrors to one of their two stable states. The micromirrors in the enabled row are attracted up or down with sufficient force to exceed the micromirrors' bistable threshold and deflect the micromirrors to their dark and white states, respectively. The attractive forces on the micromirrors in the remaining non-enabled rows are insufficient to exceed the micromirrors' bistable threshold so that the micromirrors remain in their current stable state.
摘要翻译： 薄的低功率纸白色直视显示器包括在两个稳定状态之间偏转的双稳态微镜阵列，其中镜子覆盖背景的一部分的暗状态和反射镜揭示背景的白色状态 。 驱动电子设备类似于多路复用LCD中使用的驱动电路，但是被修改以便将微镜驱动到它们的两个稳定状态之一。 启用行中的微镜分别以足够的力向上或向下吸引，以超过微镜的双稳态阈值，并将微镜分别偏转到其暗和白色状态。 剩余的非启用行中的微镜上的吸引力不足以超过微镜的双稳态阈值，使得微镜保持在其当前的稳定状态。
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公开(公告)号：US6031657A
公开(公告)日：2000-02-29
申请号：US208041
申请日：1998-12-09
CPC分类号： G02B26/0841 , H04N5/7458
摘要： The present invention provides a Schlieren projection system with a large aperture reflective imager. The combination of a beam-addressed CCM design with flat-panel manufacturing techniques configuration produces a large aperture imager that overcomes the problems of limited deflection range, high beam current, electrostatic instability and limited resolution associated with known electrostatically-actuated micromirror targets. The CCM imager includes a thin insulating membrane that decouples the electron beam from the micromirror array. Decoupling also allows the mirror to be designed to optimize reflectivity, exhibit a higher resonant frequency for better video performance, and be fabricated simultaneously with the hinges. The CCM imager is fabricated using flat-panel manufacturing techniques that are ideally suited to producing large aperture devices at low cost.
摘要翻译： 本发明提供了一种具有大孔径反射成像器的施利伦投影系统。 光束寻址CCM设计与平板制造技术配置的组合产生大孔径成像器，其克服了有限的偏转范围，远光束电流，静电不稳定性以及与已知的静电致动微镜靶相关的有限分辨率的问题。 CCM成像器包括使电子束与微镜阵列分离的薄绝缘膜。 去耦还允许将反射镜设计成优化反射率，展现更高的谐振频率以获得更好的视频性能，并与铰链同时制作。 CCM成像仪采用平板制造技术制造，非常适合以低成本生产大孔径器件。
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