发明授权
- 专利标题: Conditioner head in a substrate polisher and method
- 专利标题(中): 基材抛光机中的调节头和方法
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申请号: US890781申请日: 1997-07-11
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公开(公告)号: US6036583A公开(公告)日: 2000-03-14
- 发明人: Ilya Perlov , Eugene Gantvarg
- 申请人: Ilya Perlov , Eugene Gantvarg
- 申请人地址: CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: CA Santa Clara
- 主分类号: B24B53/017
- IPC分类号: B24B53/017 ; B24B37/04 ; B24B53/007 ; B24B53/02 ; H01L21/304 ; B24B1/00
摘要:
In one aspect, an apparatus and a method for use in substrate polishing are described wherein a conditioner head is provided for receiving an end effector for conditioning a polishing pad surface; the conditioner head is supported above the polishing pad surface to be conditioned; and the conditioner head is driven with an actuating force from a position that lies along a line that is substantially normal to the polishing pad surface to be conditioned so that an end effector attached to the conditioner head can condition the surface of the polishing pad. In another aspect, pneumatic pressure is supplied through the conditioner head support arm to apply actuating force to the conditioner head so that an end effector attached to the conditioner head can condition the surface of the polishing pad. In yet another aspect, the conditioner head support arm has a fluid channel extending therein and a fluid port, wherein the fluid channel is constructed to receive rinsing fluid and fluid port is constructed to direct rinsing fluid from the fluid channel toward the polishing pad surface to be conditioned.
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