发明授权
- 专利标题: Supporting apparatus using magnetic power
- 专利标题(中): 使用磁力的配套设备
-
申请号: US870982申请日: 1997-06-06
-
公开(公告)号: US6040675A公开(公告)日: 2000-03-21
- 发明人: Kazuya Ono
- 申请人: Kazuya Ono
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-146031 19960607
- 主分类号: B23Q3/15
- IPC分类号: B23Q3/15 ; B23Q1/44 ; B23Q15/22 ; G03F7/20 ; H01L21/027 ; H01L21/68
摘要:
A supporting apparatus for supporting a table having N degrees of freedom, where N is an integer greater than one. The apparatus includes a stage and a leaf spring mounted on the stage. The spring initially contacts the table at a contact point and has a coefficient of elasticity greater in the horizontal direction and smaller in the vertical direction. The spring also has a characteristic of positive rigidity. A pair of permanent magnets are mounted in an area between the stage and table in a vertical direction for counterbalancing the characteristic of positive rigidity of the leaf spring.
公开/授权文献
信息查询
IPC分类: