发明授权
- 专利标题： Carbon heater
- 专利标题（中）： 碳加热器
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申请号： US126847申请日： 1998-07-31
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公开(公告)号： US6043468A公开(公告)日： 2000-03-28
- 发明人: Eiichi Toya , Masahiko Ichishima , Tomio Konn , Tomohiro Nagata , Shigeru Yamamura , Norihiko Saito , Kouji Teraoka , Takeshi Inaba , Hiroyuki Honma , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
- 申请人： Eiichi Toya , Masahiko Ichishima , Tomio Konn , Tomohiro Nagata , Shigeru Yamamura , Norihiko Saito , Kouji Teraoka , Takeshi Inaba , Hiroyuki Honma , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
- 申请人地址： JPX Tokyo JPX Tokyo
- 专利权人： Toshiba Ceramics Co., Ltd.,Tokyo Electron Limited
- 当前专利权人： Toshiba Ceramics Co., Ltd.,Tokyo Electron Limited
- 当前专利权人地址： JPX Tokyo JPX Tokyo
- 优先权： JPX9-218941 19970721; JPX9-219018 19970731; JPX9-277938 19970926; JPX10-132630 19980428
- 主分类号： C30B15/14
- IPC分类号： C30B15/14 ; C30B35/00 ; H05B3/44
摘要：
A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.