公开(公告)号：US6043468A

公开(公告)日：2000-03-28

申请号：US126847

申请日：1998-07-31

申请人： Eiichi Toya ,  Masahiko Ichishima ,  Tomio Konn ,  Tomohiro Nagata ,  Shigeru Yamamura ,  Norihiko Saito ,  Kouji Teraoka ,  Takeshi Inaba ,  Hiroyuki Honma ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Masahiko Ichishima ,  Tomio Konn ,  Tomohiro Nagata ,  Shigeru Yamamura ,  Norihiko Saito ,  Kouji Teraoka ,  Takeshi Inaba ,  Hiroyuki Honma ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： C30B15/14 ,  C30B35/00 ,  H05B3/44

CPC分类号： C30B35/00 ,  C30B15/14 ,  H05B2203/003

摘要： A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.

摘要翻译： 一种碳加热器，包括加热器构件（11,111,121,161,212,222,315,325,354,411,515,612），其中多个碳纤维束具有多个碳纤维， 捆扎的直径为5〜15μm被编织成纵向细长形状，例如线状或带状，杂质含量在灰分中小于10ppm。

公开(公告)号：US06515264B2

公开(公告)日：2003-02-04

申请号：US10170539

申请日：2002-06-14

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B310

CPC分类号： H05B3/0047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

公开(公告)号：US06407371B1

公开(公告)日：2002-06-18

申请号：US09451868

申请日：1999-12-01

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Shigeru Yamamura ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B310

CPC分类号： H05B3/0047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

公开(公告)号：US06204488B1

公开(公告)日：2001-03-20

申请号：US09450755

申请日：1999-11-30

申请人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Eiichi Toya ,  Tomio Konn ,  Tomohiro Nagata ,  Norihiko Saito ,  Sunao Seko ,  Hideyuki Yokoyama ,  Ken Nakao ,  Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： H05B300

CPC分类号： F27D99/0073 ,  F27D2099/0008 ,  H01L21/67098

摘要： A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.

摘要翻译： 密封端子包括连接到加热元件的内部连接线和通过其供电的外部连接线。 石英玻璃体在其外表面中包括多个凹槽，以将内部和外部连接线保持在适当位置。 导电箔用于连接容纳在石英玻璃管中的内部和外部线，使得线的端部突出到其相应的端部之外。 一个插头设置在管的下端以封闭它。 防止火花发生，而结构简单，易于组装的低电阻密封端子。

公开(公告)号：US07479619B2

公开(公告)日：2009-01-20

申请号：US11487434

申请日：2006-07-17

申请人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

发明人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

IPC分类号： F27B5/14 ,  F27D11/00

CPC分类号： H01L21/67109 ,  H01L21/67098

摘要： The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.

摘要翻译： 本发明是一种热处理单元，包括：上端具有开口的加热炉体; 设置在所述加热炉体的内壁上的加热单元; 由包含在加热炉体内的单个管构成的反应容器; 形成在反应容器的上部的气体排出管连接部; 以及设置在气体排出管连接部周围的第一温度控制单元。

公开(公告)号：US20050028738A1

公开(公告)日：2005-02-10

申请号：US10494970

申请日：2002-09-27

申请人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

发明人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

IPC分类号： C23C16/44 ,  C23C16/455 ,  H01L21/00 ,  H01L21/205 ,  H01L21/22 ,  C23C16/00

CPC分类号： H01L21/67109 ,  H01L21/67098

摘要： The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.

摘要翻译： 本发明是一种热处理单元，包括：上端具有开口的加热炉体; 设置在所述加热炉体的内壁上的加热单元; 由包含在加热炉体内的单个管构成的反应容器; 形成在反应容器的上部的气体排出管连接部; 以及设置在气体排出管连接部周围的第一温度控制单元。

公开(公告)号：US07144823B2

公开(公告)日：2006-12-05

申请号：US10494970

申请日：2002-09-27

申请人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

发明人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

IPC分类号： H01L21/31

CPC分类号： H01L21/67109 ,  H01L21/67098

摘要： The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.

摘要翻译： 本发明是一种热处理单元，包括：上端具有开口的加热炉体; 设置在所述加热炉体的内壁上的加热单元; 由包含在加热炉体内的单个管构成的反应容器; 形成在反应容器的上部的气体排出管连接部; 以及设置在气体排出管连接部周围的第一温度控制单元。

公开(公告)号：US20060258170A1

公开(公告)日：2006-11-16

申请号：US11487434

申请日：2006-07-17

申请人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

发明人： Takanori Saito ,  Toshiyuki Makiya ,  Hisaei Osanai ,  Tsuyoshi Takizawa ,  Tomohisa Shimazu ,  Kazuhide Hasebe ,  Hiroyuki Yamamoto ,  Yukimasa Saito ,  Kenichi Yamaga

IPC分类号： H01L21/31

CPC分类号： H01L21/67109 ,  H01L21/67098

摘要： The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.

公开(公告)号：US06444940B1

公开(公告)日：2002-09-03

申请号：US09890328

申请日：2001-07-30

申请人： Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

发明人： Takanori Saito ,  Hisaei Osanai ,  Toshiyuki Makiya

IPC分类号： F27B514

CPC分类号： H01L21/67109 ,  C23C16/46

摘要： The heat treatment apparatus has the reaction vessel and the holding tool contained in the reaction vessel for holding a plurality of objects to be processed. The lower end of the reaction vessel is closed by the cover and the insulating unit is installed between the cover and the holding tool. On the top of the insulating unit, the heating unit having a heating resistor composed of a carbon material of high-purity sealed in a quartz plate is installed. Heat insulators are installed under the heating unit. The insulating unit is fixed to the cover, and the revolving shaft for rotating the holding tool passes in the center of the insulating unit, and the electric feeding line member for feeding electric power to the heating unit is arranged outside of the insulating unit.

摘要翻译： 热处理装置具有容纳在反应容器中的用于保持多个待处理物体的反应容器和保持工具。 反应容器的下端由盖封闭，绝缘单元安装在盖和保持工具之间。 在绝缘单元的顶部，安装具有由密封在石英板中的高纯度碳材料构成的加热电阻器的加热单元。 热绝缘子安装在加热单元下。 绝缘单元固定在盖上，用于旋转保持工具的旋转轴穿过绝缘单元的中心，并且用于将电力馈送到加热单元的馈电线构件设置在绝缘单元的外部。

公开(公告)号：US07141765B2

公开(公告)日：2006-11-28

申请号：US10473248

申请日：2002-03-20

申请人： Toshiyuki Makiya ,  Takanori Saito ,  Karuki Eickmann ,  Sanjeev Kaushal ,  Anthony Dip ,  David L. O'meara

发明人： Toshiyuki Makiya ,  Takanori Saito ,  Karuki Eickmann ,  Sanjeev Kaushal ,  Anthony Dip ,  David L. O'meara

IPC分类号： H05B1/02 ,  A21B1/00

CPC分类号： G01K7/04 ,  G01K1/20

摘要： A antireflective film 50 is formed on a thermocouple 42 arranged in a processing vessel 1 of a heat treatment apparatus in order to improve the transient response characteristics of the thermocouple 42. In a typical embodiment, the thermocouple 42 is made by connecting a platinum wire 43A and a platinum-rhodium alloy wire 43B, and the antireflective film 50 is composed by stacking a silicon nitride layer 50C, silicon layer 50B and a silicon nitride layer 50A in that order.

摘要翻译： 为了改善热电偶42的瞬态响应特性，在设置在热处理装置的处理容器1中的热电偶42上形成防反射膜50。 在一个典型的实施例中，热电偶42是通过连接铂线43A和铂 - 铑合金线43B制成的，并且抗反射膜50由叠氮化硅层50C，硅层50B和硅 氮化物层50A。