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US6046484A Gate structure of semiconductor memory 失效
半导体存储器的门结构

Gate structure of semiconductor memory
摘要:
An improved semiconductor memory device comprising memory cell areas including driving transistors having capacitors with increased capacitance. The driving transistors comprise a gate insulating film formed on a semiconductor substrate, a lower gate electrode formed on the gate insulating film, an upper gate electrode having a size smaller than the lower gate electrode and formed on the lower gate electrode, and an insulating film formed on the lower gate electrode so as to contact with a side wall of the upper gate electrode.
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