发明授权
- 专利标题: Electron microscope
- 专利标题(中): 电子显微镜
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申请号: US126432申请日: 1998-07-30
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公开(公告)号: US6051834A公开(公告)日: 2000-04-18
- 发明人: Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
- 申请人: Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX3-110126 19910515; JPX7-326817 19951215; JPX8-123064 19960517
- 主分类号: H01J37/26
- IPC分类号: H01J37/26 ; H01J37/28
摘要:
3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.
公开/授权文献
- US5397835A Polyamide thermoplastic elastomer obtained by blending 公开/授权日:1995-03-14
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