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US6059982A Micro probe assembly and method of fabrication 失效
微探头组件及其制造方法

Micro probe assembly and method of fabrication
摘要:
A probe assembly including an integral fine probe tip, conductive line with terminal connection for testing semiconductor devices and a method of construction of the probe assembly is described. The method of construction described utilizes the step of etching pits into silicon wafers to produce molds for forming the probe point. Semiconductor machining processes are used to complete the probe assembly.
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