发明授权
- 专利标题: Micro probe assembly and method of fabrication
- 专利标题(中): 微探头组件及其制造方法
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申请号: US940916申请日: 1997-09-30
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公开(公告)号: US6059982A公开(公告)日: 2000-05-09
- 发明人: Anthony Michael Palagonia , Paul Joseph Pikna , John Thomas Maddix
- 申请人: Anthony Michael Palagonia , Paul Joseph Pikna , John Thomas Maddix
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: B81B1/00
- IPC分类号: B81B1/00 ; B81C1/00 ; G01R1/067 ; G01R3/00 ; B44C1/22 ; H05K3/00
摘要:
A probe assembly including an integral fine probe tip, conductive line with terminal connection for testing semiconductor devices and a method of construction of the probe assembly is described. The method of construction described utilizes the step of etching pits into silicon wafers to produce molds for forming the probe point. Semiconductor machining processes are used to complete the probe assembly.
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