发明授权
- 专利标题: Atomic absorption analysis for measuring and controlling the amount of a metal vapor in vapor deposition coating line and apparatus therefor
- 专利标题(中): 用于测量和控制气相沉积涂层生产线中金属蒸气量的原子吸收分析及其设备
-
申请号: US822433申请日: 1997-03-21
-
公开(公告)号: US6060109A公开(公告)日: 2000-05-09
- 发明人: Hiroshi Tanaka , Yasushi Fukui , Minoru Saito
- 申请人: Hiroshi Tanaka , Yasushi Fukui , Minoru Saito
- 申请人地址: JPX
- 专利权人: Nisshin Steel Co., Ltd.
- 当前专利权人: Nisshin Steel Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX8-099314 19960327; JPX9-009487 19970122; JPX9-009488 19970122; JPX9-028762 19970213
- 主分类号: G01N21/31
- IPC分类号: G01N21/31 ; C23C14/54
摘要:
A metal vapor 12 passing through a guide duct 13 from a vapor source 10 to a steel strip 1 is sampled through a takeoff pipe 14 to a measuring chamber 15. The metal vapor is irradiated with a measuring beam 20 in the chamber 15, to detect the absorbance of luminous energy in the metal vapor. The detected value of absorbance is used for the quantitative calculation of the metal vapor 12 passing through the guide duct 13, and the opening ratio of a shutter 17 provided in the guide duct 13 is adjusted on the basis of the calculation result so as to control the flow amount of the metal vapor 12 passing through the guide duct 13. In the case where a large amount of the metal vapor 12 passes through the guide duct 13, the amount of the metal vapor 12 reaching the measuring beam 20 is reduced by partially discharging the metal vapor 12 from the measuring chamber 15. Since the deposition amount of a plating metal is directly controlled in response to the amount of the metal vapor 2 passing through the guide duct 13, the amount of a deposited plating layer is controlled with high accuracy and with a quick response time in a continuous vapor deposition coating line.
公开/授权文献
- USD302233S Corkscrew 公开/授权日:1989-07-18
信息查询
IPC分类: