发明授权
US6060128A Method of producing thin film and nanoparticle deposits using charges of
alternating polarity
失效
使用交替极性的电荷制备薄膜和纳米颗粒沉积物的方法
- 专利标题: Method of producing thin film and nanoparticle deposits using charges of alternating polarity
- 专利标题(中): 使用交替极性的电荷制备薄膜和纳米颗粒沉积物的方法
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申请号: US281144申请日: 1999-03-29
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公开(公告)号: US6060128A公开(公告)日: 2000-05-09
- 发明人: Kyekyoon Kim , Qichen Feng
- 申请人: Kyekyoon Kim , Qichen Feng
- 申请人地址: IL Urbana
- 专利权人: The Board of Trustees of the University of Illinois
- 当前专利权人: The Board of Trustees of the University of Illinois
- 当前专利权人地址: IL Urbana
- 主分类号: B05B5/00
- IPC分类号: B05B5/00 ; B05B5/025 ; B05D1/04
摘要:
A method for producing a thin film or nanoparticle deposit includes the step of providing a working liquid, movement of the working liquid at a liquid surface prevented by surface tension. The method also includes the steps of supplying an electric charge having a first polarity to the working liquid at the liquid surface to overcome surface tension at the liquid surface to produce a first plurality of charged nanodrops and directing the first plurality of charged nanodrops against a substrate surface. The method further includes the steps of supplying an electric charge having a second polarity to the working liquid at the liquid surface, the second polarity being opposite to the first polarity, to overcome surface tension at the liquid surface to produce a second plurality of charged nanodrops, and directing the second plurality of charged nanodrops against the substrate surface. The method additionally includes the step of alternating between supplying the electric charge having the first polarity and supplying the electric charge having the second polarity to the working liquid at the liquid surface. An apparatus for producing a thin film or nanoparticle deposit includes an apparatus for supplying a working liquid, surface tension preventing movement of the working liquid from the apparatus for supplying a working fluid at a liquid surface, an apparatus for supplying an electric charge to the working liquid at the liquid surface to overcome the surface tension to produce a stream of nanodrops, and an apparatus for supplying electric charge of alternating polarity to the apparatus for supplying the electric charge to the working liquid at the liquid surface.
公开/授权文献
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