发明授权
- 专利标题: Aqueous dispersion slurry of inorganic particles and production methods thereof
- 专利标题(中): 无机颗粒的水分散体浆料及其制备方法
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申请号: US135840申请日: 1998-08-18
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公开(公告)号: US06068769A公开(公告)日: 2000-05-30
- 发明人: Akira Iio , Masayuki Hattori , Masayuki Motonari
- 申请人: Akira Iio , Masayuki Hattori , Masayuki Motonari
- 申请人地址: JPX Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX9-238869 19970819; JPX10-100862 19980413; JPX10-191443 19980707
- 主分类号: B01F3/12
- IPC分类号: B01F3/12 ; B01F7/00 ; B01F7/30 ; B24B37/04 ; B24B57/02 ; C09D17/00 ; C09K3/14 ; B01D24/00 ; B01D37/00 ; B03B1/00 ; C04B33/00
摘要:
The present invention provides aqueous dispersion slurry of inorganic particles which is so stable as not to increase in viscosity, gel or sediment even if stored for a long time and therefore can be used as raw materials for, for example, cosmetics, paint, coating materials and lapping slurry for semiconductor wafers, and production method of such aqueous dispersion slurry. The aqueous dispersion slurry according to the present invention has the number of particles whose a particle diameter of 1.3 .mu.m or more is 180,000 or less per mL in terms of 30 wt % in concentration, and the average particle diameter thereof is in a range of 0.05-0.9 .mu.m. The number of particles having aparticle diameter of 1.3 .mu.m or more is counted by using Particle Sensor KS-60, which is a light extinction type sensor for detecting particles, and Particle Counter KL-11, which is a particle counter, both of which made by the same manufacturer, Rion Electro Corp. The average particle diameter is measured by using Laser Particle Analyzer System Par-III made by Otsuka Denshi Co., Ltd.
公开/授权文献
- US5384816A Frequency divider circuit 公开/授权日:1995-01-24
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