Carbon fluoride particles in which a number-average particle size is 0.01 to 50 .mu.m, a content of particles having such a diameter that the particles size distribution falls with in range of the number-average particle size .+-.20% amounts to at least 50% of the whole, a true specific gravity is 1.7 to 2.5, a F/C as a whole is 0.001 to 0.5, and a F/C at the surface is always larger than the F/C as a whole and is 0.1 to 2. 0. These carbon fluoride partilces are obtainable by reacting carbon particles with fluorine at 350.degree. to 600.degree. C. for one minute to six hours. These carbon fluoride particles have an excellent dispersibility and a powder flowability, and are usable solely or in the form of a composite, as water- and oil-repellents, non-tackifying agents, solid lubricants, agents for imparting electric conductivity, additives to toner for developing electrostatic image, additives to coating of carrier for developing electrostatic image, composit materials for fixing roller, phosphoric acid fuel cells, zinc/air batteries and nickel/hydride storage batteries.