发明授权
- 专利标题： Microbellows actuator
- 专利标题（中）： 微型致动器
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申请号： US57381申请日： 1998-04-08
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公开(公告)号： US6069392A公开(公告)日： 2000-05-30
- 发明人: Yu-Chong Tai , Xing Yang
- 申请人： Yu-Chong Tai , Xing Yang
- 申请人地址： CA Pasadena
- 专利权人： California Institute of Technology
- 当前专利权人： California Institute of Technology
- 当前专利权人地址： CA Pasadena
- 主分类号： B81B3/00
- IPC分类号： B81B3/00 ; B82B3/00 ; H01L21/00 ; H01L29/82
摘要：
A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.
公开/授权文献
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