发明授权
- 专利标题： Mechanically coupled alternatively usable cantilever structures for scanning a surface
- 专利标题（中）： 用于扫描表面的机械耦合的可选择的悬臂结构
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申请号： US142796申请日： 1998-09-14
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公开(公告)号： US6079255A公开(公告)日： 2000-06-27
- 发明人: Gerd K. Binnig , Jurgen Brugger , Walter Haeberle , Heinrich Rohrer , Peter Vettiger
- 申请人： Gerd K. Binnig , Jurgen Brugger , Walter Haeberle , Heinrich Rohrer , Peter Vettiger
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： G01B21/30
- IPC分类号： G01B21/30 ; G01B5/28 ; G01B7/34 ; G01N37/00 ; G01Q60/32 ; G01Q70/10 ; G11B9/00 ; G11B9/14 ; G12B1/00
摘要：
The present invention concerns a cantilever arrangement for scanning a surface. This arrangement comprises a first cantilever having a first probe and a second cantilever having a second probe. Both cantilevers are mechanically coupled such that the second cantilever follows the movement of the first cantilever, i.e. the deflection of the first cantilever defines the deflection of the second cantilever.
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