发明授权
- 专利标题： Cleaning method
- 专利标题（中）： 清洗方法
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申请号： US109066申请日： 1998-07-02
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公开(公告)号： US6082373A公开(公告)日： 2000-07-04
- 发明人: Naoaki Sakurai , Hisashi Nishigaki , Naoya Hayamizu , Hiroshi Fujita
- 申请人： Naoaki Sakurai , Hisashi Nishigaki , Naoya Hayamizu , Hiroshi Fujita
- 申请人地址： JPX Kawasaki
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JPX Kawasaki
- 优先权： JPX8-176440 19960705; JPX9-177153 19970702
- 主分类号： B08B3/10
- IPC分类号： B08B3/10 ; B08B3/12 ; C02F1/46 ; C11D7/00 ; H01L21/00 ; H01L21/02 ; H01L21/304 ; B08B3/00 ; B08B5/00 ; B03C23/00
摘要：
Provided is a cleaning method for effectively removing particles on the surface of an object to be cleaned. This cleaning method includes dissolving oxygen into deaerated pure water to prepare a cleaning fluid, and cleaning an object to be cleaned by bringing the object into contact with the cleaning fluid to which ultrasonic vibration is being applied.
公开/授权文献
- USD422216S Pump dispenser shroud 公开/授权日：2000-04-04
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