发明授权
US6084674A Parallelogram shaped optical retarder element for use in spectroscopic
ellipsometer and polarimeter systems
有权
用于光谱椭偏仪和偏振计系统的平行四边形光学延迟器元件
- 专利标题: Parallelogram shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems
- 专利标题(中): 用于光谱椭偏仪和偏振计系统的平行四边形光学延迟器元件
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申请号: US225118申请日: 1999-01-04
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公开(公告)号: US6084674A公开(公告)日: 2000-07-04
- 发明人: Blaine D. Johs , Craig M. Herzinger , Steven E. Green
- 申请人: Blaine D. Johs , Craig M. Herzinger , Steven E. Green
- 申请人地址: NE Lincoln
- 专利权人: J. A. Woollam Co., Inc.
- 当前专利权人: J. A. Woollam Co., Inc.
- 当前专利权人地址: NE Lincoln
- 主分类号: G01J3/28
- IPC分类号: G01J3/28 ; G02B5/30 ; G01J4/00
摘要:
A retarder system and method of its use in ellipsometers and polarimeters are disclosed. The retarder system is a parallelogram shaped element which, as viewed in side elevation, has top and bottom sides which are parallel to one another. The retarder system also has right and left sides which are parallel to one another, with both the right and left sides being oriented at an angle to the top and bottom sides. The retarder system is made of a material with an index of refraction greater than that of a surrounding ambient. In use an input beam of electromagnetic radiation is caused to enter the right or left side of the retarder system, is diffracted inside the retarder system, and follows a locus which causes it to essentially totally internally reflect from internal interfaces of both the top and bottom sides, then emerge from the retarder system at the opposite, left or right respectively, side in a direction which is essentially undeviated and undisplaced from the locus of the input beam of electromagnetic radiation, even when the retarder system is caused to rotate about an axis coincident with the locus of the electromagentic beam.
公开/授权文献
- US4973153A Method and apparatus for finding range 公开/授权日:1990-11-27
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