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US6088378A Ring cavity type surface emitting semiconductor laser and fabrication method thereof 失效
环形腔表面发射半导体激光器及其制造方法

Ring cavity type surface emitting semiconductor laser and fabrication
method thereof
摘要:
A surface emitting semiconductor laser of a ring cavity type with a small cavity loss includes a ring cavity or resonator which is constructed wituout using at least one of a pair of special high-reflection multi-layer mirrors and formed in a plane approximately perpendicular to its substrate. The ring cavity is built by a parallel face parallel to the substrate and at least one total reflection face formed opposed to the parallel face. The total reflection face may be a mesa-shaped semiconductor face, a polygonal cone-shaped semiconductor face, a quadrangular cone-shaped semiconductor, a circular cone-shaped semiconductor face or the like.
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