发明授权
- 专利标题: Compostion for anti-reflective coating material
- 专利标题(中): 防反射涂料的组成
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申请号: US908522申请日: 1997-08-07
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公开(公告)号: US06090531A公开(公告)日: 2000-07-18
- 发明人: Kazuyoshi Mizutani , Hiroshi Yoshimoto
- 申请人: Kazuyoshi Mizutani , Hiroshi Yoshimoto
- 申请人地址: JPX Kanagawa
- 专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人地址: JPX Kanagawa
- 优先权: JPX8-208630 19960807; JPX8-208631 19960807
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; G03F7/09 ; G03F7/26 ; G03F7/38
摘要:
A composition for anti-reflective coating material is disclosed, comprising a polymer compound having repeating units having specific structure, and optionally a melamine, guanamine, urea, phenol, naphthol or hydroxyanthracene compound substituted by at least one group selected from the group consisting of a methylol group and an alkoxymethyl group at two or more positions. The composition for anti-reflective coating material of the present invention is effective for the reduction of adverse effects of reflection by the substrate in a lithographic process using various radiations. A resist pattern formation process which comprises the use of the composition for anti-reflective coating material is also disclosed.
公开/授权文献
- USD313117S Golf bag 公开/授权日:1990-12-25
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