发明授权
US6099982A Starting powders for ITO production, ITO sinters and processes for
producing such starting powders and ITO sinters
失效
用于ITO生产的起始粉末，ITO烧结体和用于生产这种起始粉末和ITO烧结体的方法
- 专利标题： Starting powders for ITO production, ITO sinters and processes for producing such starting powders and ITO sinters
- 专利标题（中）： 用于ITO生产的起始粉末，ITO烧结体和用于生产这种起始粉末和ITO烧结体的方法
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申请号： US966936申请日： 1997-11-10
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公开(公告)号： US6099982A公开(公告)日： 2000-08-08
- 发明人: Katsuaki Okabe , Tsuyoshi Nishimura , Shinji Sato , Kohichiro Eshima , Kouki Toishi , Choju Nagata
- 申请人： Katsuaki Okabe , Tsuyoshi Nishimura , Shinji Sato , Kohichiro Eshima , Kouki Toishi , Choju Nagata
- 申请人地址： JPX Tokyo
- 专利权人： Dowa Mining Co., Ltd.
- 当前专利权人： Dowa Mining Co., Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX8-312916 19961108; JPX9-320352 19971106
- 主分类号： C04B35/457
- IPC分类号： C04B35/457 ; C01G15/00 ; C01G19/00 ; C01G19/02 ; C23C14/34
摘要：
The starting salts for ITO production, precipitant and the conditions for reaction, calcination, etc. are specified such as to synthesize a starting oxide adapted to be free from volatile components such as halides and lower oxides; the starting oxide is dispersed to particles having a specified flowability; the powder is pressed into a compact, which is sintered in either air atmosphere or an oxygen-rich atmosphere to produce a large and high-density sinter for use as an ITO sputtering target.
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