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US6100708A Probe card and wafer testing method using the same 失效
探针卡和晶圆测试方法使用相同

Probe card and wafer testing method using the same
Abstract:
A probe needle has one end and the other end. Probe needle has its one end fixed to the bottom surface of a substrate, and extending at a prescribed angle to substrate. A portion of probe needle positioned between the one end and the other end is pressed by a rod attacked between a pair of pillow toward substrate. Thus, an improved probe card which permits appropriate pressure needle to be provided even if the variation in the height of probe needles is large.
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