发明授权
- 专利标题: Electroplating uniformity by diffuser design
- 专利标题(中): 通过扩散器设计的电镀均匀性
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申请号: US205584申请日: 1998-12-04
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公开(公告)号: US6103085A公开(公告)日: 2000-08-15
- 发明人: Christy Mei-Chu Woo , John A. Iacoponi , Kai Yang
- 申请人: Christy Mei-Chu Woo , John A. Iacoponi , Kai Yang
- 申请人地址: CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: CA Sunnyvale
- 主分类号: C25D5/08
- IPC分类号: C25D5/08 ; C25D7/12 ; C25D17/00 ; H01L21/288 ; C25D5/04
摘要:
Workpieces, such as semiconductor wafers, are electroplated with improved thickness uniformity by providing a diffuser member intermediate the cathode and anode of a fountain-type electroplating apparatus. The diffuser or member has a pattern of openings specifically designed to prevent channeling and/or selective directing of electrolyte towards the workpiece. In one embodiment, the diffuser member comprises a spiral-shaped pattern of openings originating at the center of the diffuser member and extending to the periphery thereof.
公开/授权文献
- US5660914A Fabric material 公开/授权日:1997-08-26
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