发明授权
- 专利标题： Method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method
- 专利标题（中）： 微加工结构的制造方法和使用这种方法制造的微加工结构
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申请号： US913232申请日： 1997-12-30
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公开(公告)号： US6103399A公开(公告)日： 2000-08-15
- 发明人: Elisabeth Smela , Olle Inganas , Ingemar Lundstrom , Ove Ohman
- 申请人： Elisabeth Smela , Olle Inganas , Ingemar Lundstrom , Ove Ohman
- 申请人地址： SEX Linkoping SEX Linkoping SEX Linkoping
- 专利权人： Smela; Elisabeth,Inganas; Olle,Lundstrom; Ingemar
- 当前专利权人： Smela; Elisabeth,Inganas; Olle,Lundstrom; Ingemar
- 当前专利权人地址： SEX Linkoping SEX Linkoping SEX Linkoping
- 优先权： SEX9500849 19950310
- 主分类号： H01L29/84
- IPC分类号： H01L29/84 ; B81B3/00 ; B81C1/00 ; H01L21/02 ; H01L21/302 ; H01L21/306 ; H01L21/3065 ; H01L49/00 ; H01L21/06
摘要：
The invention relates to a method for manufacturing a micromachined structure to be at least partly released from a substrate surface. A surface contact area, over which structure and the said substrate surface are in surface contact with each other during the manufacturing step, is divided into at least a first and a second contact zone, the adhesiveness between the structure and the substrate being greater in the first contact zone than in the second contact zone. As a manufacturing step, or as a step subsequent to the manufacturing, the structure can be released from the substrate surface at least over said second contact zone. The completed structure may also be completely loose from the substrate. The invention is also directed to a micromachined structure manufactured according to the method.
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