Invention Grant
- Patent Title: Integrated optical apparatus and associated methods
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Application No.: US274310Application Date: 1999-03-23
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Publication No.: US6104690APublication Date: 2000-08-15
- Inventor: Michael R. Feldman , Alan D. Kathman , W. Hudson Welch
- Applicant: Michael R. Feldman , Alan D. Kathman , W. Hudson Welch
- Applicant Address: NC Charlotte
- Assignee: Digital Optics Corporation
- Current Assignee: Digital Optics Corporation
- Current Assignee Address: NC Charlotte
- Main IPC: G02B5/18
- IPC: G02B5/18 ; G02B6/12 ; G02B6/42 ; G02B6/43 ; G11B7/12 ; G11B7/135 ; G11B7/22 ; H01L31/12 ; H01S5/00 ; G11B7/00
Abstract:
An integrated optical apparatus includes an optically transparent substrate with a light source and a detector mounted adjacent thereto. The substrate includes an optical element in a transmit path from the light source to a remote target. The optical element splits the light into more than one beam. A detector receives beams reflected by the target. All optical elements needed to create the more then one beam, direct the more than one beam onto the target and direct the more than one beam from the target to the detector are on the substrate and/or any structure bonded to the substrate. Preferably, the optical element provides sufficient separation between the more than one beam such that each beam is delivered to a unique respective light detecting element of the detector. The return path from the remote target to the detector may include an optical element for each beam or no optical elements. An additional substrate may be included and bonded to the substrate. The active elements may be bonded to a bottom surface of the substrate, either directly or via spacer blocks, or may be provided on a support substrate, which is then bonded, either directly or via spacer blocks, to the substrate.
Public/Granted literature
- US5563702A Automated photomask inspection apparatus and method Public/Granted day:1996-10-08
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