发明授权
US6111122A Group II MOCVD source reagents, and method of forming Group II
metal-containing films utilizing same
失效
II族MOCVD源试剂,以及使用其形成含有II族金属的膜的方法
- 专利标题: Group II MOCVD source reagents, and method of forming Group II metal-containing films utilizing same
- 专利标题(中): II族MOCVD源试剂,以及使用其形成含有II族金属的膜的方法
-
申请号: US67557申请日: 1998-04-28
-
公开(公告)号: US6111122A公开(公告)日: 2000-08-29
- 发明人: Witold Paw , Thomas H. Baum
- 申请人: Witold Paw , Thomas H. Baum
- 申请人地址: CT Danbury
- 专利权人: Advanced Technology Materials, Inc.
- 当前专利权人: Advanced Technology Materials, Inc.
- 当前专利权人地址: CT Danbury
- 主分类号: C07F3/00
- IPC分类号: C07F3/00 ; C23C16/40 ; C07F9/00 ; C23C8/00
摘要:
Novel Group II metal MOCVD precursor compositions are described having utility for MOCVD of the corresponding Group II metal-containing films. The complexes are Group II metal .beta.-diketonate Lewis base adducts having ligands such as: (i) amines bearing terminal NH.sub.2 groups; (ii) imine ligands formed as amine (i)/carbonyl reaction products; (iii) combination of two or more of the foregoing ligands (i)-(ii), and (iv) combination of one or more of the foregoing ligands (i)-(ii) with one or more other ligands or solvents. The source reagent complexes of barium and strontium are usefully employed in the formation of barium strontium titanate and other Group II doped thin-films on substrates for microelectronic device applications, such as intearated circuits, ferroelectric memories, switches, radiation detectors, thin-film capacitors, microelectromechanical structures (MEMS) and holoaraphic storage media.
公开/授权文献
- US5363092A Portable signaling device 公开/授权日:1994-11-08
信息查询