发明授权
US6115521A Fiber/waveguide-mirror-lens alignment device 失效
光纤/波导镜镜对准装置

Fiber/waveguide-mirror-lens alignment device
摘要:
The invention relates to an optical integrated alignment device for accurately aligning optical fiber and waveguides to efficiently couple energy between optical devices. This is accomplished by using the anisotropic etch characteristics of III-V semiconductor materials. One orthogonal etch direction serves to provide a channel for precise fiber-positioning; the other direction, which is also orthogonal provides a reflecting surface for directing the optical energy between optical devices; and finally, a non-selective etch to form a micro-optical lens to focus optical energy to an optical device.
公开/授权文献
信息查询
0/0