发明授权
- 专利标题: Semiconductor die metal layout for flip chip packaging
- 专利标题(中): 半导体模具金属布局用于倒装芯片封装
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申请号: US963553申请日: 1997-11-03
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公开(公告)号: US6118180A公开(公告)日: 2000-09-12
- 发明人: Mike C. Loo , Mike T. Liang , Ramoji K. Rao
- 申请人: Mike C. Loo , Mike T. Liang , Ramoji K. Rao
- 申请人地址: CA Milpitas
- 专利权人: LSI Logic Corporation
- 当前专利权人: LSI Logic Corporation
- 当前专利权人地址: CA Milpitas
- 主分类号: H01L23/485
- IPC分类号: H01L23/485 ; H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
Provided is a semiconductor flip chip die metal layout which provides a flat UBM where surface metal pads are narrower than UBMs in order to accommodate decreased die pitch. This is achieved by depositing a metal region adjacent to and closely spaced from the pad which, together with the pad, is capable of providing a substrate that will result in a substantially flat passivation layer surface on which the UBM is subsequently deposited. The adjacent closely spaced metal region may be provided by bringing metal traces closer to a reduced size surface metal pad (into the die surface area underlying the UBM), and/or by depositing dummy metal similarly near the pad. The dummy metal may also be deposited over the whole chip surface area not occupied by other electrical components.
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