A semiconductor wafer batchloading system comprises a portable carrier for supporting and transporting wafers in a substantially particle free environment. A carrier door is movable between an open position and a closed position overlying a carrier port for sealing the interior of the carrier from the surrounding environment. The carrier is movable on a platform between withdrawn and advanced positions for delivering multiple wafers to a wafer receiving station. A plurality of spaced rack members support the wafers, each being aligned with an associated one of a plurality of spaced shelves on the wafer receiving station. The wafer receiving station may be located within a load lock defining a chamber having a substantially particle free environment and including a load lock port with a load lock door movable between a closed position overlying the load lock port and an open position spaced therefrom. A locking mechanism releasably locks the carrier door to the carrier. The carrier door drive mechanism includes a generally planar door opener movable between a lowered position and a raised position substantially coextensive with the carrier port. The door opener is also movable between a first position proximate the carrier port and a second position distant from the carrier port and a removal mechanism operates the locking mechanism to release the carrier door from the carrier port and supports the carrier door when the carrier door has been released from the carrier.