发明授权
- 专利标题： Long wavelength light emitting vertical cavity surface emitting laser and method of fabrication
- 专利标题（中）： 长波长发光垂直腔表面发射激光器及其制造方法
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申请号： US47954申请日： 1998-03-26
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公开(公告)号： US6121068A公开(公告)日： 2000-09-19
- 发明人: Jamal Ramdani , Michael S. Lebby , Wenbin Jiang
- 申请人： Jamal Ramdani , Michael S. Lebby , Wenbin Jiang
- 申请人地址： IL Schaumburg
- 专利权人： Motorola, Inc.
- 当前专利权人： Motorola, Inc.
- 当前专利权人地址： IL Schaumburg
- 主分类号： H01S3/02
- IPC分类号： H01S3/02 ; H01S5/00 ; H01S5/02 ; H01S5/183 ; H01L21/00
摘要：
A longwavelength vertical cavity surface emitting laser (VCSEL) for use in optical telecommunications and method of fabrication that includes the fabrication of an active VCSEL structure on a supporting substrate and the fabrication of a highly reflective DBR mirror structure on a silicon substrate. The DBR mirror structure includes alternating layers of a silicon oxide material and a silicon material fabricated utilizing epitaxially growth techniques and/or wafer bonding using SOI wafer fusion technology. During fabrication of the final VCSEL device, the Si/SiO.sub.2 DBR mirror structure is wafer bonded to the active VCSEL structure. The active VCSEL structure supporting substrate is selectively removed, to enable positioning of a second DBR mirror stack. The final VCSEL device characterized by emitting infra-red light.
公开/授权文献
- USD386760S CD-ROM jukebox 公开/授权日：1997-11-25
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