发明授权
US6121631A Test structure to determine the effect of LDD length upon transistor
performance
失效
测试结构,以确定LDD长度对晶体管性能的影响
- 专利标题: Test structure to determine the effect of LDD length upon transistor performance
- 专利标题(中): 测试结构,以确定LDD长度对晶体管性能的影响
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申请号: US267444申请日: 1999-03-12
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公开(公告)号: US6121631A公开(公告)日: 2000-09-19
- 发明人: Mark I Gardner , Fred N. Hause , H. Jim Fulford, Jr.
- 申请人: Mark I Gardner , Fred N. Hause , H. Jim Fulford, Jr.
- 申请人地址: CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: CA Sunnyvale
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L23/544 ; H01L29/78 ; H01L23/58 ; H01L27/088 ; H01L31/119
摘要:
The present invention advantageously provides a method for forming a test structure for determining how LDD length of a transistor affects transistor characteristics. In one embodiment, a first polysilicon gate conductor is provided which is laterally spaced from a second polysilicon gate conductor. The gate conductors are each disposed upon a gate oxide lying above a silicon-based substrate. An LDD implant is forwarded into exposed regions of the substrate to form LDD areas within the substrate adjacent to the gate conductors. A first spacer material is then formed upon sidewall surfaces of both gate conductors to a first pre-defined thickness. Source/drain regions are formed exclusively within the substrate a spaced distance from the first gate conductor, the spaced distance being dictated by the first pre-defined thickness. A second spacer material is formed laterally adjacent to the first spacer material to a second pre-defined distance. Source/drain regions are then formed within the substrate a spaced distance from the second gate conductor, the spaced distance being dictated by the second predefined thickness. The resulting transistors have a mutual source/drain region between them. More transistors may also be fabricated in a similar manner.
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