发明授权
- 专利标题: Method for the application of a scratch protection layer and an antireflection coating system and apparatus for its execution
- 专利标题(中): 用于施加刮擦保护层的方法和用于其执行的抗反射涂层系统和装置
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申请号: US363850申请日: 1999-07-30
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公开(公告)号: US6126792A公开(公告)日: 2000-10-03
- 发明人: Heinrich Grunwald , Michael Liehr
- 申请人: Heinrich Grunwald , Michael Liehr
- 申请人地址: DEX Hanau
- 专利权人: Leybold Systems GmbH
- 当前专利权人: Leybold Systems GmbH
- 当前专利权人地址: DEX Hanau
- 优先权: DEX19834314 19980730
- 主分类号: G02C7/02
- IPC分类号: G02C7/02 ; C23C14/34 ; C23C14/56 ; C23C16/44 ; C23C16/455 ; C23C16/50 ; C23C16/511 ; C23C16/54 ; C23C17/34
摘要:
For the application of a scratch protection layer on plastic substrates, a plasma is produced by the plasma CVD method, away from the individual plastic substrate, in an excitation gas, and this excitation gas is supplied through a tube to the plastic substrate. Subsequently, an antireflection layer is applied by means of a gas flow sputter source. The apparatus provided for this has a plasma CVD chamber (1) and a gas flow sputter chamber (2), next to one another. The plastic substrates (7,8) to be coated are transported from the plasma CVD chamber (2) to the gas flow sputter chamber (1) with the aid of a transporting device (3), designed as a turning plate.
公开/授权文献
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