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US6126792A Method for the application of a scratch protection layer and an antireflection coating system and apparatus for its execution 失效
用于施加刮擦保护层的方法和用于其执行的抗反射涂层系统和装置

Method for the application of a scratch protection layer and an
antireflection coating system and apparatus for its execution
摘要:
For the application of a scratch protection layer on plastic substrates, a plasma is produced by the plasma CVD method, away from the individual plastic substrate, in an excitation gas, and this excitation gas is supplied through a tube to the plastic substrate. Subsequently, an antireflection layer is applied by means of a gas flow sputter source. The apparatus provided for this has a plasma CVD chamber (1) and a gas flow sputter chamber (2), next to one another. The plastic substrates (7,8) to be coated are transported from the plasma CVD chamber (2) to the gas flow sputter chamber (1) with the aid of a transporting device (3), designed as a turning plate.
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