发明授权
- 专利标题: Single trianglular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems
- 专利标题(中): 用于光谱椭偏仪和偏光计系统的单三角形光学延迟器元件
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申请号: US232257申请日: 1999-01-19
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公开(公告)号: US6141102A公开(公告)日: 2000-10-31
- 发明人: Blaine D. Johs , Craig M. Herzinger , Steven E. Green
- 申请人: Blaine D. Johs , Craig M. Herzinger , Steven E. Green
- 申请人地址: NE Lincoln
- 专利权人: J. A. Woolam Co. INC
- 当前专利权人: J. A. Woolam Co. INC
- 当前专利权人地址: NE Lincoln
- 主分类号: G01J3/28
- IPC分类号: G01J3/28 ; G01J4/00
摘要:
Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.
公开/授权文献
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