发明授权
US6143374A Method for precise placement of an array of single particles on a surface
失效
在表面上精确放置单个颗粒阵列的方法
- 专利标题: Method for precise placement of an array of single particles on a surface
- 专利标题(中): 在表面上精确放置单个颗粒阵列的方法
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申请号: US18669申请日: 1998-02-04
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公开(公告)号: US6143374A公开(公告)日: 2000-11-07
- 发明人: Allan Cairncross , John Edwin Gantzhorn, Jr.
- 申请人: Allan Cairncross , John Edwin Gantzhorn, Jr.
- 申请人地址: DE Wilmington
- 专利权人: E. I. du Pont de Nemours and Company
- 当前专利权人: E. I. du Pont de Nemours and Company
- 当前专利权人地址: DE Wilmington
- 主分类号: H01L21/48
- IPC分类号: H01L21/48 ; H05K3/34 ; B05D1/12
摘要:
Methods and apparatus are disclosed for efficiently and precisely adhering and centering particles on tacky areas on a surface containing an array of tacky and non-tacky areas. These methods and apparatus for particle attachment and centering involve holding and heating of the surface containing an array of tacky and non-tacky areas with particles adhered thereon for a period of time and at a temperature to allow the particles to adhere and center to the tacky areas. The surface containing the array of tacky and non-tacky areas can be heated either prior to, during or after a step of contacting the array with particles. Either discrete sheets or a continuous moving web of material having a surface containing an array of tacky and non-tacky areas can be employed. Each tacky area of an array of tacky and non-tacky areas has a size and bonding strength suitable for adhesion of one particle thereto in formation of an array. The array is populated with conductive-particles, is useful in the precise placement of particles on contact pads of electronic devices, such as circuit boards in semiconductor applications.
公开/授权文献
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