发明授权
- 专利标题: Thin film multilayered electrode of high frequency electromagnetic field coupling
- 专利标题(中): 高频电磁场耦合薄膜多层电极
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申请号: US604952申请日: 1996-02-27
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公开(公告)号: US6148221A公开(公告)日: 2000-11-14
- 发明人: Youhei Ishikawa , Seiji Hidaka
- 申请人: Youhei Ishikawa , Seiji Hidaka
- 申请人地址: JPX
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPXP5-212630 19930827
- 主分类号: H01L39/12
- IPC分类号: H01L39/12 ; H01P1/20 ; H01P1/203 ; H01P3/06 ; H01P3/08 ; H01P3/12 ; H01P3/18 ; H01P7/08 ; H01P1/201
摘要:
A plurality of TEM mode transmission lines (L2-L5) are structured by pairs of thin film conductors (21 and 22, 22 and 23, 23 and 24, and 24 and 25) which sandwich thin film dielectrics (31 to 34) by alternately stacking the thin film conductor (21 to 25) and the thin film dielectric (31 to 34). The phase velocities of TEM mode waves which are propagated at least by two of the transmission lines (L2 to L5) are substantially equal to each other. The thickness of each of the thin film conductors (21 to 25) is smaller than the skin depth of the frequency used so that the electromagnetic fields of at least two TEM mode transmission lines among the TEM mode transmission lines (L2 to L5) are coupled to each other. In this way, the skin depth can be increased effectively. The conductor loss and the surface resistance can be reduced significantly as compared to those of the conventional electrode. By use of this electrode, a transmission line, a resonator, a filter, and a high frequency device are structured.
公开/授权文献
- US5128902A Electromechanical transducer for acoustic telemetry system 公开/授权日:1992-07-07
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