发明授权

Thin film multilayered electrode of high frequency electromagnetic field
coupling
摘要:
A plurality of TEM mode transmission lines (L2-L5) are structured by pairs of thin film conductors (21 and 22, 22 and 23, 23 and 24, and 24 and 25) which sandwich thin film dielectrics (31 to 34) by alternately stacking the thin film conductor (21 to 25) and the thin film dielectric (31 to 34). The phase velocities of TEM mode waves which are propagated at least by two of the transmission lines (L2 to L5) are substantially equal to each other. The thickness of each of the thin film conductors (21 to 25) is smaller than the skin depth of the frequency used so that the electromagnetic fields of at least two TEM mode transmission lines among the TEM mode transmission lines (L2 to L5) are coupled to each other. In this way, the skin depth can be increased effectively. The conductor loss and the surface resistance can be reduced significantly as compared to those of the conventional electrode. By use of this electrode, a transmission line, a resonator, a filter, and a high frequency device are structured.
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