发明授权
- 专利标题： Thin film semiconductor device for active matrix panel
- 专利标题（中）： 有源矩阵面板薄膜半导体器件
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申请号： US274475申请日： 1994-07-13
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公开(公告)号： US6150692A公开(公告)日： 2000-11-21
- 发明人: Toshihiko Iwanaga , Masumitsu Ino , Kikuo Kaise , Takenobu Urazono , Hiroyuki Ikeda
- 申请人： Toshihiko Iwanaga , Masumitsu Ino , Kikuo Kaise , Takenobu Urazono , Hiroyuki Ikeda
- 申请人地址： JPX Tokyo
- 专利权人： Sony Corporation
- 当前专利权人： Sony Corporation
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX5-195511 19930713; JPX5-252624 19930914; JPX6-079410 19940324
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; H01L21/336 ; H01L29/786 ; H01L29/78
摘要：
A thin film semiconductor device comprising a thin film transistor (TFT) having a thin film semiconductor on an insulation substrate to define an element region, and a hygroscopic interlayer insulating layer which covers said element,a hydrogenation treatment which comprises said interlayer insulating layer provided thereon a capping layer for blocking hydrogen diffusion, so that water entrapped by the interlayer insulating layer may be decomposed to generate hydrogen which is allowed to diffuse into the thin film transistor provided on the side opposite to that of the capping layer.
公开/授权文献
- US4909231A Dual anchor cable separator for compound bows 公开/授权日：1990-03-20
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