发明授权
US6158721A Apparatus and method for adding carbon dioxide gas to ultra pure water 有权
将二氧化碳气体添加到超纯水中的装置和方法

Apparatus and method for adding carbon dioxide gas to ultra pure water
摘要:
A small flow of a water with a high carbon dioxide content (normally a carbon-dioxide-saturated water) is produced using hollow-fiber membranes, and is uniformly mixed with a large flow of untreated water with constant proportions. Since the hollow-fiber membrane module has a reserve capacity for adding carbon dioxide to the water, the resistivity of the mixed water is maintained at a constant level by maintaining constant proportions of the small and large flows, even if the total flow rate fluctuates due to fluctuations in the rate of water used in a subsequent process. Accordingly, no automated control device is particularly necessary in order to maintain the resistivity at a constant level. Therefore, a compact and simple apparatus can be produced which can operate at a low cost.
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