发明授权
US6159760A Method of fabricating oxide-aperture vertical cavity surface emitting
lasers
有权
制造氧化物孔径垂直腔表面发射激光器的方法
- 专利标题: Method of fabricating oxide-aperture vertical cavity surface emitting lasers
- 专利标题(中): 制造氧化物孔径垂直腔表面发射激光器的方法
-
申请号: US301843申请日: 1999-04-29
-
公开(公告)号: US6159760A公开(公告)日: 2000-12-12
- 发明人: Keith Wayne Goossen , Martin C. Nuss
- 申请人: Keith Wayne Goossen , Martin C. Nuss
- 申请人地址: NJ Murray Hill
- 专利权人: Lucent Technologies Inc.
- 当前专利权人: Lucent Technologies Inc.
- 当前专利权人地址: NJ Murray Hill
- 主分类号: H01S5/183
- IPC分类号: H01S5/183 ; H01S5/42 ; H01L21/00
摘要:
A method of fabricating oxide-apertured vertical cavity surface emitting lasers involving the steps of: i) defining, during the fabrication of one or more VCSELs on an electronic chip, a number of mesa structures of different sizes; ii) selectively oxidizing the chip and mesa structures to produce an oxide-aperture for each structure; iii) inspecting the chip to determine which one of the mesas is desired or optimal; iv) choosing an appropriate metalization mask that serves to metalize and electrically connect only that desired mesa structure; and v) depositing, a dielectric top mirror on that electrically connected mesa. Advantageously, the method may be practiced using a variety of fabrication techniques and apparatus that are compatible with conventional devices. A distinguishing characteristic of our inventive method, is that only a desired or optimal mesa is completed while the remaining mesas on a particular chip remain unprocessed.
公开/授权文献
- US5577466A Modular play structure for animals 公开/授权日:1996-11-26
信息查询