发明授权
- 专利标题: Nonlinear resistor with electrodes formed by plasma spraying
- 专利标题(中): 具有通过等离子喷涂形成的电极的非线性电阻器
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申请号: US217188申请日: 1998-12-22
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公开(公告)号: US6163245A公开(公告)日: 2000-12-19
- 发明人: Hideyasu Andoh , Yoshiyasu Itoh , Hironori Suzuki , Susumu Nishiwaki
- 申请人: Hideyasu Andoh , Yoshiyasu Itoh , Hironori Suzuki , Susumu Nishiwaki
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX9-3532253 19971222
- 主分类号: C23C4/08
- IPC分类号: C23C4/08 ; C23C4/12 ; H01C1/142 ; H01C7/10 ; H01C7/112 ; H01C17/28 ; H01L7/13
摘要:
A nonlinear resistor is formed by forming side surface insulating layer 2 on a sintered body 1 which contains zinc oxide as a main component and providing a pair of electrodes 3 on upper and lower surfaces of the sintered body 1. The electrodes 3 are formed by plasma thermal spraying of less than 10 kW in an atmosphere in which an oxygen concentration is set to 22 volume % or less. The electrodes 3 are formed of aluminum, copper, zinc, nickel, silver, or their alloy whose average particle size is within 5 .mu.m to 50 .mu.m. Preferably porosity is less than 15%, weight percentage of metal oxide is less than 25%, average film thickness is within 5 .mu.m to 500 .mu.m, average surface roughness is less than 8 .mu.m, and resistivity is less than 15 .mu..OMEGA..multidot.cm. Accordingly, the nonlinear resistor having the excellent discharge withstand can be provided.
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