发明授权
- 专利标题: Method to fabricate poly tip in split-gate flash
- 专利标题(中): 在分闸式闪光灯中制造多头尖端的方法
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申请号: US298931申请日: 1999-04-26
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公开(公告)号: US6165845A公开(公告)日: 2000-12-26
- 发明人: Chia-Ta Hsieh , Yai-Fen Lin , Hung-Cheng Sung , Jack Yeh , Di-Son Kuo
- 申请人: Chia-Ta Hsieh , Yai-Fen Lin , Hung-Cheng Sung , Jack Yeh , Di-Son Kuo
- 申请人地址: TWX Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company
- 当前专利权人: Taiwan Semiconductor Manufacturing Company
- 当前专利权人地址: TWX Hsin-Chu
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/336 ; H01L29/423
摘要:
A method is provided to form a sharp poly tip to improve the speed of a split-gate flash memory. The sharp poly tip is provided in place of the conventional gate bird's beak (GBB) because the latter requires the forming of thick poly-oxide which is more and more difficult in the miniaturized circuits of the ultra scale integrated technology. Furthermore, it is well known that GBB encroaches under the gate edge in a split-gate flash and degrades the programmability of submicron memory cells. The sharp poly tip of the invention is provided by forming a tapered floating gate through a high pressure etch such that the tip of the upper edge of the floating gate under the poly oxide is sharper and more robust, and, therefore, less susceptible to damage during the manufacture of the cell. The invention is also directed to a semiconductor device fabricated by the disclosed method.
公开/授权文献
- US4957369A Apparatus for measuring three-dimensional surface geometries 公开/授权日:1990-09-18
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