发明授权
US06168845A Patterned magnetic media and method of making the same using selective oxidation
有权
图案化的磁性介质和使用选择性氧化制备相同的方法
- 专利标题： Patterned magnetic media and method of making the same using selective oxidation
- 专利标题（中）： 图案化的磁性介质和使用选择性氧化制备相同的方法
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申请号： US09233710申请日： 1999-01-19
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公开(公告)号： US06168845A公开(公告)日： 2001-01-02
- 发明人: Robert Edward Fontana, Jr. , Richard Hsiao , Ernesto Esteban Marinero , Hugo Alberto Emilio Santini , Bruce David Terris
- 申请人： Robert Edward Fontana, Jr. , Richard Hsiao , Ernesto Esteban Marinero , Hugo Alberto Emilio Santini , Bruce David Terris
- 主分类号： B32B302
- IPC分类号： B32B302
摘要：
A new method for making patterned magnetic storage media with magnetic and substantially non-magnetic zones utilizes a selective oxidation processes. Selective oxidation is achieved by subjecting a magnetic layer to an oxygen plasma through voids in a patterned mask. A high resolution patterned mask is made by embossing and reactive ion etch processes. The method is used to fabricate patterned magnetic disks media with alternating magnetic and non-magnetic zones ranging from 10 to 1000 Nanometers in width. Magnetic storage disks produced by this method have high-bit densities, minimal topography and reduced signal noise.
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