公开(公告)号：US06168845A

公开(公告)日：2001-01-02

申请号：US09233710

申请日：1999-01-19

申请人： Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Ernesto Esteban Marinero ,  Hugo Alberto Emilio Santini ,  Bruce David Terris

发明人： Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Ernesto Esteban Marinero ,  Hugo Alberto Emilio Santini ,  Bruce David Terris

IPC分类号： B32B302

CPC分类号： B82Y10/00 ,  G11B5/656 ,  G11B5/743 ,  G11B5/82 ,  G11B5/84 ,  G11B5/855 ,  Y10S428/90 ,  Y10T428/31678

摘要： A new method for making patterned magnetic storage media with magnetic and substantially non-magnetic zones utilizes a selective oxidation processes. Selective oxidation is achieved by subjecting a magnetic layer to an oxygen plasma through voids in a patterned mask. A high resolution patterned mask is made by embossing and reactive ion etch processes. The method is used to fabricate patterned magnetic disks media with alternating magnetic and non-magnetic zones ranging from 10 to 1000 Nanometers in width. Magnetic storage disks produced by this method have high-bit densities, minimal topography and reduced signal noise.

摘要翻译： 用于制造具有磁性和基本上非磁性区域的图案化磁存储介质的新方法利用选择性氧化工艺。 通过在图案化掩模中通过空隙使磁性层经受氧等离子体来实现选择性氧化。 通过压花和反应离子蚀刻工艺制成高分辨率图案掩模。 该方法用于制造具有10至1000纳米宽度的交替磁性和非磁性区域的图案化磁盘介质。 通过该方法制造的磁存储盘具有高位密度，最小的形貌和降低的信号噪声。

公开(公告)号：US07116516B2

公开(公告)日：2006-10-03

申请号：US10611090

申请日：2003-06-30

申请人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

发明人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5/127

CPC分类号： G11B5/313 ,  G11B5/012 ,  G11B5/127 ,  G11B5/17 ,  G11B5/3163 ,  Y10T29/49046

摘要： The present invention is a magnetic head having a helical induction coil and includes hard disk drive devices that utilize the magnetic head. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.

摘要翻译： 本发明是一种具有螺旋感应线圈的磁头，并且包括利用磁头的硬盘驱动装置。 在包括反应离子蚀刻（RIE）工艺步骤的一系列工艺步骤中围绕磁极轭制造螺旋线圈，其用于同时形成垂直互连通孔和上部螺旋线圈构件沟槽。 此后，在单个制造步骤中，例如通过电镀，在单个制造步骤中产生垂直互连线和上部螺旋线圈迹线，使得它们整体形成。 垂直互连线在先前形成的下螺旋线圈迹线的外端和整体形成的上螺旋线圈迹线的外端之间提供电连接，从而制造螺旋线圈。 在优选实施例中，螺旋线圈由铜构成。

公开(公告)号：US06819527B1

公开(公告)日：2004-11-16

申请号：US09535089

申请日：2000-03-23

申请人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

发明人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

IPC分类号： G11B517

CPC分类号： G11B5/313 ,  G11B5/012 ,  G11B5/127 ,  G11B5/17 ,  G11B5/3163 ,  Y10T29/49046

摘要： A magnetic head having a helical induction coil. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.

摘要翻译： 具有螺旋感应线圈的磁头。 在包括反应离子蚀刻（RIE）工艺步骤的一系列工艺步骤中围绕磁极轭制造螺旋线圈，其用于同时形成垂直互连通孔和上部螺旋线圈构件沟槽。 此后，在单个制造步骤中，例如通过电镀，在单个制造步骤中产生垂直互连线和上部螺旋线圈迹线，使得它们整体形成。 垂直互连线在先前形成的下螺旋线圈迹线的外端和整体形成的上螺旋线圈迹线的外端之间提供电连接，从而制造螺旋线圈。 在优选实施例中，螺旋线圈由铜构成。

公开(公告)号：US06338939B1

公开(公告)日：2002-01-15

申请号：US09645163

申请日：2000-08-24

申请人： Thomas Carl Clarke ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Eric James Lee ,  Hugo Alberto Emilio Santini

发明人： Thomas Carl Clarke ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Eric James Lee ,  Hugo Alberto Emilio Santini

IPC分类号： G11B517

CPC分类号： G11B5/313 ,  G11B5/3967 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052 ,  Y10T29/49064

摘要： A read/write head is provided with an embedded planar dual coil write structure. The head includes generally parallel shield, shield/pole, and pole layers. The shield/pole layer abuts a generally coplanar planarization layer in one embodiment. A circuitous recess is defined in the shield/pole and planarization layer, spanning the junction twice and encircling a central hub of adjoining shield/pole and planarization layer material. A write structure is located in the recess, with the shield/pole layer, planarization layer, and embedded write structure forming a substantially flat surface for building the pole layer. The write structure includes first and second substantially co-planar multi-turn flat coils, where turns of the first write coil are interspersed with turns of the second write coil. The first and second write coils reside in the circuitous recess, winding around the central hub. An insulating material separates the first and second coils.

摘要翻译： 读/写头具有嵌入式平面双线圈写结构。 头部包括大致平行的屏蔽，屏蔽/极和极层。 在一个实施例中，屏蔽/极层邻接大致共面的平坦化层。 在屏蔽/极和平坦化层中限定了一个迂回的凹槽，跨越结两次并围绕相邻的屏蔽/极和平坦化层材料的中心毂。 写入结构位于凹部中，屏蔽/极层，平坦化层和嵌入式写入结构形成用于构建极层的基本上平坦的表面。 该写入结构包括第一和第二基本上共面的多匝扁平线圈，其中第一写入线圈的匝与第二写入线圈的匝分散。 第一和第二写入线圈驻留在迂回凹部中，围绕中心毂绕过。 绝缘材料分离第一和第二线圈。

公开(公告)号：US06191918B1

公开(公告)日：2001-02-20

申请号：US09178377

申请日：1998-10-23

申请人： Thomas Carl Clarke ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Eric James Lee ,  Hugo Alberto Emilio Santini

发明人： Thomas Carl Clarke ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Eric James Lee ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5147

CPC分类号： G11B5/313 ,  G11B5/3967 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052 ,  Y10T29/49064

摘要： A read/write head is provided with an embedded planar dual coil write structure. The head includes generally parallel shield, shield/pole, and pole layers. The shield/pole layer abuts a generally coplanar planarization layer in one embodiment. A circuitous recess is defined in the shield/pole and planarization layer, spanning the junction twice and encircling a central hub of adjoining shield/pole and planarization layer material. A write structure is located in the recess, with the shield/pole layer, planarization layer, and embedded write structure forming a substantially flat surface for building the pole layer. The write structure includes first and second substantially co-planar multi-turn flat coils, where turns of the first write coil are interspersed with turns of the second write coil. The first and second write coils reside in the circuitous recess, winding around the central hub. An insulating material separates the first and second coils.

摘要翻译： 读/写头具有嵌入式平面双线圈写结构。 头部包括大致平行的屏蔽，屏蔽/极和极层。 在一个实施例中，屏蔽/极层邻接大致共面的平坦化层。 在屏蔽/极和平坦化层中限定了一个迂回的凹槽，跨越结两次并围绕相邻的屏蔽/极和平坦化层材料的中心毂。 写入结构位于凹部中，屏蔽/极层，平坦化层和嵌入式写入结构形成用于构建极层的基本上平坦的表面。 该写入结构包括第一和第二基本上共面的多匝扁平线圈，其中第一写入线圈的匝与第二写入线圈的匝分散。 第一和第二写入线圈驻留在迂回凹部中，围绕中心毂绕过。 绝缘材料分离第一和第二线圈。

公开(公告)号：US5798890A

公开(公告)日：1998-08-25

申请号：US811490

申请日：1997-03-05

申请人： Robert Edward Fontana, Jr. ,  Steven Robert Hetzler ,  Hugo Alberto Emilio Santini ,  Mason Lamar Williams

发明人： Robert Edward Fontana, Jr. ,  Steven Robert Hetzler ,  Hugo Alberto Emilio Santini ,  Mason Lamar Williams

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/48 ,  G11B21/00 ,  G11B5/60 ,  G11B21/21

CPC分类号： G11B5/3967 ,  G11B21/00 ,  G11B5/3103 ,  G11B5/4813 ,  G11B5/4886 ,  G11B5/3166 ,  G11B5/3948

摘要： A magnetic recording disk drive uses side-by-side read/write heads formed on head carriers that are substantially identical for both top and bottom disk surfaces. Thus, a common head carrier functions as a single manufacturable part usable for both top and bottom disk surfaces. The common head carrier has a trailing end with a pattern of components formed on it that includes three side-by-side transducers and sets of terminal pads. In the read/write/read side-by-side head arrangement, the first element is a center write element, such as an inductive coil, and the second and third elements are read elements, such as magnetoresistive read elements, that are generally equally spaced from the center write element. In common carriers to be used for the top disk surfaces, one of the read elements is electrically connected to the read/write channel of the disk drive, and in common carriers to be used for the bottom disk surfaces, the other read element on the common carrier is electrically connected to the read/write channel. The disk drive thus operates in cylinder mode with side-by-side heads using a common carrier for both top and bottom disk surfaces.

摘要翻译： 磁记录盘驱动器使用形成在头托架上的并排读/写头，其对于顶盘和底盘表面基本相同。 因此，公共的头托架用作可用于顶部和底部盘表面的单个可制造部件。 公共头托架具有后端，其上形成有包括三个并排换能器和端子排组的部件图案。 在读/写/读并排磁头布置中，第一元件是诸如感应线圈的中心写元件，并且第二和第三元件是读取元件，例如磁阻读取元件，其大致相等 与中心写入元件间隔开。 在用于顶部磁盘表面的公共载体中，读取元件中的一个电连接到磁盘驱动器的读取/写入通道，并且在用于底部磁盘表面的公共载体中，另一个读取元件 公共载体电连接到读/写通道。 因此，磁盘驱动器以圆柱模式并行地使用顶部和底部磁盘表面的公共载体。

公开(公告)号：US5896249A

公开(公告)日：1999-04-20

申请号：US138836

申请日：1998-08-24

申请人： Robert Edward Fontana, Jr. ,  Steven Robert Hetzler ,  Hugo Alberto Emilio Santini ,  Mason Lamar Williams

发明人： Robert Edward Fontana, Jr. ,  Steven Robert Hetzler ,  Hugo Alberto Emilio Santini ,  Mason Lamar Williams

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/48 ,  G11B21/00 ,  G11B5/60

CPC分类号： G11B5/3967 ,  G11B21/00 ,  G11B5/3103 ,  G11B5/4813 ,  G11B5/4886 ,  G11B5/3166 ,  G11B5/3948

摘要： A magnetic recording disk drive uses side-by-side read/write heads formed on head carriers that are identical for both top and bottom disk surfaces. Thus, a common head carrier functions as a single manufacturable part usable for both top and bottom disk surfaces. The common head carrier has a trailing end with a pattern of components formed on it that includes three side-by-side transducers (two read elements equally spaced about a center write element) and five terminal pads, one of which is a common pad, and all of the electrical connectors interconnecting the five terminal pads with the three transducers. There are only three terminal pads for the two read elements, with one of the read terminal pads being a common terminal pad that is electrically connected to both read elements. During assembly of the disk drive, the common carrier, when used as the top carrier, has a first read terminal pad and the common terminal pad connected to the leads on the suspension. When used as the bottom carrier, the second read terminal pad and the common terminal pad are connected to the leads on the suspension. Thus, only one carrier common to both top and bottom sides of the disk needs to be manufactured. The uniqueness of the top and bottom carriers is obtained by the wiring connection of the read terminal pads to the leads on the suspensions.

摘要翻译： 磁记录盘驱动器使用形成在头托架上的并排读/写头，其对于顶盘和底盘表面是相同的。 因此，公共的头托架用作可用于顶部和底部盘表面的单个可制造部件。 公共头托架具有后端，其上形成有包括三个并排换能器（两个读取元件，围绕中心写入元件等间隔开）的部件图案，以及五个端子焊盘，其中一个是公共焊盘， 并且所有电连接器将五个端子焊盘与三个换能器互连。 两个读取元件只有三个端子焊盘，其中一个读取端子焊盘是与两个读取元件电连接的公共端子焊盘。 在盘驱动器的组装期间，公共载体当用作顶部载体时，具有第一读取端子焊盘，并且公共端子焊盘连接到悬架上的引线。 当用作底部载体时，第二读取端子焊盘和公共端子焊盘连接到悬架上的引线。 因此，只需要制造一个与磁盘的顶面和底面共同的载体。 顶部和底部载体的唯一性是通过将读取的端子焊盘连接到悬架上的引线而获得的。

公开(公告)号：US06821715B2

公开(公告)日：2004-11-23

申请号：US09853345

申请日：2001-05-10

申请人： Robert Edward Fontana, Jr. ,  Jordan A. Katine ,  Jennifer Liu ,  Scott A. MacDonald ,  Michael J. Rooks ,  Hugo Alberto Emilio Santini

发明人： Robert Edward Fontana, Jr. ,  Jordan A. Katine ,  Jennifer Liu ,  Scott A. MacDonald ,  Michael J. Rooks ,  Hugo Alberto Emilio Santini

IPC分类号： G11B539

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3903 ,  G11B5/3909 ,  G11B2005/3996 ,  Y10T29/49032 ,  Y10T29/49044 ,  Y10T29/49052

摘要： A suspended resist bridge suitable for lithographically patterning MR sensors having trackwidths narrower than 0.2 micron is fabricated using the method of the present invention. First, PMGI is spun onto a substrate to form a first thin resist layer. Next, PMMA is spun onto the first resist layer to form a second resist layer. The PMMA layer is exposed to an electron beam to pattern the trackwidth of the MR sensors. E-beam exposed PMMA is then developed in an IPA solution. The resist structure is then placed in a basic solution for dissolving PMGI, which results in a fully undercut resist bridge that is used for patterning the MR sensors.

摘要翻译： 使用本发明的方法制造适于光刻图形具有窄于0.2微米的轨道宽度的MR传感器的悬浮抗蚀桥。 首先，将PMGI旋转到基板上以形成第一薄抗蚀剂层。 接下来，将PMMA旋涂到第一抗蚀剂层上以形成第二抗蚀剂层。 将PMMA层暴露于电子束以对MR传感器的轨道宽度进行图案化。 然后在IPA解决方案中开发电子束暴露的PMMA。 然后将抗蚀剂结构放置在用于溶解PMGI的碱性溶液中，这导致用于图案化MR传感器的完全底切抗蚀剂桥。

公开(公告)号：US06609948B1

公开(公告)日：2003-08-26

申请号：US09724247

申请日：2000-11-27

申请人： Robert Edward Fontana, Jr. ,  Richard Hsiao

发明人： Robert Edward Fontana, Jr. ,  Richard Hsiao

IPC分类号： B24B4900

CPC分类号： B82Y10/00 ,  G11B5/3166 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3903 ,  Y10T29/49044 ,  Y10T29/49048

摘要： An electronic lapping guide (ELG) and method of making are provided for precisely lapping a read sensor to a designed air bearing surface (ABS). In the method a sensor material layer is formed on a wafer after which a portion of the sensor material layer is removed and ELG material is deposited therein. This is followed by forming track widths and back edges for each of the ELG and the read sensor to be followed by lapping to the ABS. Various films are employed for the ELG to minimize magnetoresistance and optimize the resistance of the ELG. The resistance of the ELG is then sensed by a computer for controlling a lapping tool to lap to the aforementioned ABS.

摘要翻译： 提供电子研磨导向器（ELG）和制造方法，用于将读取的传感器精确地研磨到设计的空气轴承表面（ABS）。 在该方法中，在晶片上形成传感器材料层，之后去除传感器材料层的一部分并且将ELG材料沉积在其中。 随后，为每个ELG和读取传感器形成轨道宽度和后边缘，随后通过研磨到ABS。 使用各种膜用于ELG以最小化磁阻并优化ELG的电阻。 然后由计算机感测到ELG的电阻以控制研磨工具以搭接到上述ABS。

公开(公告)号：US07161773B2

公开(公告)日：2007-01-09

申请号：US11075079

申请日：2005-03-07

申请人： Robert Edward Fontana, Jr. ,  Kuok San Ho ,  Tao Pan ,  Ching Hwa Tsang

发明人： Robert Edward Fontana, Jr. ,  Kuok San Ho ,  Tao Pan ,  Ching Hwa Tsang

IPC分类号： G11B5/39 ,  G11B5/127

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G01R33/098 ,  G11B5/3932 ,  G11B2005/3996 ,  Y10T29/49044 ,  Y10T29/49046

摘要： Several embodiments of a sense current perpendicular to the planes of the sensor (CPP) and flux guide type of read head has a gap between first and second shield layers at an air bearing surface (ABS) where the flux guide is located which is less than a gap between the first and second shield layers at a recessed location where the sensor is located. This reduced gap increases the linear bit density capability of the read head. A longitudinal bias stack (LBS) is located in the sensor stack. Several unique methods of construction are described for forming the magnetic head assemblies.

摘要翻译： 垂直于传感器（CPP）的平面的感测电流和读取头的通量引导类型的几个实施例在通量指示器所在的空气轴承表面（ABS）处具有小于第一和第二屏蔽层的空隙 第一和第二屏蔽层之间在传感器所在的凹陷位置处的间隙。 这种减小的间隙增加了读取头的线性位密度能力。 纵向偏置堆栈（LBS）位于传感器堆叠中。 描述了用于形成磁头组件的几种独特的结构方法。