发明授权
US06169935A Control method of stocker entry task and stocker exit task in semiconductor wafer cassette transportation apparatus 失效
半导体晶片盒运输装置中储存器进入任务和储存器退出任务的控制方法

  • 专利标题: Control method of stocker entry task and stocker exit task in semiconductor wafer cassette transportation apparatus
  • 专利标题(中): 半导体晶片盒运输装置中储存器进入任务和储存器退出任务的控制方法
  • 申请号: US09035920
    申请日: 1998-03-06
  • 公开(公告)号: US06169935A
    公开(公告)日: 2001-01-02
  • 发明人: Junji IwasakiJunichi KatsubeYasushi Itami
  • 申请人: Junji IwasakiJunichi KatsubeYasushi Itami
  • 优先权: JP9-214916 19970808
  • 主分类号: G06F700
  • IPC分类号: G06F700
Control method of stocker entry task and stocker exit task in semiconductor wafer cassette transportation apparatus
摘要:
In a stocker entry task control method employed in a semiconductor wafer cassette transportation apparatus that has high transportation ability of a semiconductor wafer cassette, a host computer sends an interrogation to a stocker in which a semiconductor wafer cassette is to be stored whether there is an available storage site therein. The stocker ascertains the storage site if available. Then, the host computer sends a transportation task instruction to an inter-stocker transport device or an automatic carrier. Alternatively, an entry task instruction is sent to the stocker.
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