Cleaning process end point determination using throttle valve position

Invention Grant

US06170492B2 Cleaning process end point determination using throttle valve position 失效

Title translation: 清洗过程终点确定使用节气门位置

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Patent Title: Cleaning process end point determination using throttle valve position
Patent Title (中): 清洗过程终点确定使用节气门位置
Application No.: US09097411

Application Date: 1998-06-15
Publication No.: US06170492B2

Publication Date: 2001-01-09
Inventor: Hiroyuki Ueda , Hirotaka Tanabe , Makoto Okubo , Shankar Chandran , Ellie Yieh
Applicant: Hiroyuki Ueda , Hirotaka Tanabe , Makoto Okubo , Shankar Chandran , Ellie Yieh
Main IPC: B08B900
IPC: B08B900

Cleaning process end point determination using throttle valve position

Abstract:

The present invention provides a method and apparatus for detecting the end point of a process by monitoring the position of a valve during the process. In one aspect, a cleaning process is performed in the chamber, and a controller monitors the valve position to determine the end point of the process which corresponds to a decrease in the number of steps in the valve position required to achieve a stable throttle valve position after the cleaning process is complete.

Abstract(Chinese):

本发明提供了一种通过在该过程期间监视阀的位置来检测过程终点的方法和装置。在一个方面，在室中执行清洁处理，并且控制器监视阀位置以确定过程的终点，其对应于实现稳定节气门位置所需的阀位数的减少清洁过程完成后。

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