发明授权
- 专利标题: Collective substrate of active-matrix substrates, manufacturing method thereof and inspecting method thereof
- 专利标题(中): 有源矩阵基板的集合基板及其制造方法及其检查方法
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申请号: US09348659申请日: 1999-07-06
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公开(公告)号: US06172410B2公开(公告)日: 2001-01-09
- 发明人: Hisashi Nagata , Mikio Katayama , Toshihiro Yamashita , Manabu Takahama
- 申请人: Hisashi Nagata , Mikio Katayama , Toshihiro Yamashita , Manabu Takahama
- 优先权: JP10-199227 19980714
- 主分类号: H01L23544
- IPC分类号: H01L23544
摘要:
A collective substrate of active-matrix substrates is divided into a first block and a second block. In cells of the first block and the second block, from a corresponding signal input pad group, an inspection scanning signal is inputted via a scanning-line short ring connecting line to scanning lines, an inspection display signal is inputted via a signal-line short ring connecting line to signal lines, and an auxiliary capacity wire signal is inputted via an auxiliary capacity wire main wire connecting line to auxiliary capacity wires. This arrangement makes it possible to perform an electrical inspection with high accuracy and efficiency on a large-format active-matrix substrate, and to manufacture an inspection probe frame in a simple manner at low cost.
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