发明授权
- 专利标题: Strip detector
- 专利标题(中): 带状探测器
-
申请号: US09171677申请日: 1999-05-03
-
公开(公告)号: US06184562B2公开(公告)日: 2001-02-06
- 发明人: Josef Kemmer , Gerhard Lutz , Rainer Richter , Lothar Struder , Ladislav Andricek , Thomas Gebhart
- 申请人: Josef Kemmer , Gerhard Lutz , Rainer Richter , Lothar Struder , Ladislav Andricek , Thomas Gebhart
- 优先权: DE19620081 19960520
- 主分类号: H01L2978
- IPC分类号: H01L2978
摘要:
A strip detector for detecting ionizing particles and/or radiation, consisting of a silicon substrate which, at least on one substrate surface thereof, provides for n-doped zones spaced from each other as strips and voltage supply regions as well as a p-doped isolation zone between the n-doped zones, and including a first isolator layer as well as metal strips disposed above the n-doped zones, wherein immediately above the first isolated layer there is at least one further isolator layer provided and that at least one of the isolator layers is discontinuous in its projection above the intermediate zone of the two adjacent n-doped zones, and wherein the p-doped isolation zone presents a lateral distribution of concentration of the p-type doping material such that in the zone below the discontinuity of the discontinuous isolator layer, a higher concentration of doping material is present than in the isolation regions immediately adjacent to the n-doped zones.
信息查询