发明授权
US06190778B1 Process for joining two solid bodies and the resultant structural element
失效
用于连接两个固体和所得结构元件的方法
- 专利标题: Process for joining two solid bodies and the resultant structural element
- 专利标题(中): 用于连接两个固体和所得结构元件的方法
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申请号: US09299920申请日: 1999-04-28
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公开(公告)号: US06190778B1公开(公告)日: 2001-02-20
- 发明人: Christoph Batz-Sohn , Gertrud Krauter , Ulrich Gosele
- 申请人: Christoph Batz-Sohn , Gertrud Krauter , Ulrich Gosele
- 优先权: DE19818962 19980428
- 主分类号: B32B712
- IPC分类号: B32B712
摘要:
A process for joining two solid bodies, in particular of silicon. via the substantially smooth surfaces that have first of all been coated with a monomolecular layer of a sulfur-containing organosilane, and the resultant solid bodies, which may be used in microelectronics or micromechanics.
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