发明授权
US06190778B1 Process for joining two solid bodies and the resultant structural element 失效
用于连接两个固体和所得结构元件的方法

Process for joining two solid bodies and the resultant structural element
摘要:
A process for joining two solid bodies, in particular of silicon. via the substantially smooth surfaces that have first of all been coated with a monomolecular layer of a sulfur-containing organosilane, and the resultant solid bodies, which may be used in microelectronics or micromechanics.
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