发明授权
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US08859571申请日: 1997-05-20
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公开(公告)号: US06191476B1公开(公告)日: 2001-02-20
- 发明人: Kunihiro Takahashi , Mizuaki Suzuki , Tsuneo Yamazaki , Hiroaki Takasu , Kunio Nakajima , Atsushi Sakurai , Tadao Iwaki , Yoshikazu Kojima , Masaaki Kamiya
- 申请人: Kunihiro Takahashi , Mizuaki Suzuki , Tsuneo Yamazaki , Hiroaki Takasu , Kunio Nakajima , Atsushi Sakurai , Tadao Iwaki , Yoshikazu Kojima , Masaaki Kamiya
- 优先权: JP4-283091 19921021; JP5-33601 19930223; JP5-52477 19930312; JP5-162957 19930630; JP5-180484 19930721; JP5-222627 19930907
- 主分类号: H01L2310
- IPC分类号: H01L2310
摘要:
To provide a semiconductor substrate and a light-valve semiconductor substrate capable of preventing the threshold value of a MOS transistor on a single-crystal silicon device forming layer from increasing and forming a MOS integrated circuit with a high reliability even for a long-time operation. A semiconductor substrate and a light-valve semiconductor substrate comprising a single-crystal silicon thin-film device forming layer 5001 formed above an insulating substrate 5004 through an adhesive layer 5003 and an insulating layer 5002 formed on the single-crystal silicon thin-film device forming layer, wherein a heat conductive layers 5201 and 5202 made of a material with a high heat conductivity are arranged between the single-crystal silicon thin-film device forming layer and the adhesive layer and on the insulating layer.
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