发明授权
- 专利标题: Pyrolytic boron nitride container and manufacture thereof
- 专利标题(中): 热解氮化硼容器及其制造
-
申请号: US08971258申请日: 1997-11-17
-
公开(公告)号: US06197391B1公开(公告)日: 2001-03-06
- 发明人: Noboru Kimura , Takuma Kushihashi , Kazuhiro Yamaguchi , Akira Satoh
- 申请人: Noboru Kimura , Takuma Kushihashi , Kazuhiro Yamaguchi , Akira Satoh
- 优先权: JP8-322280 19961118
- 主分类号: B01L304
- IPC分类号: B01L304
摘要:
There is disclosed a pyrolytic boron nitride container for accommodating a material serving as a source of molecular beams for molecular beam epitaxy, wherein the transmissivity of the pyrolytic boron nitride container with respect to light having a wave number of 2600 cm−1 to 6500 cm−1 has a profile such that the transmissivity changes in the height direction of the container. The pyrolytic boron nitride container can be manufactured through a simple process and at low cost. The pyrolytic boron nitride container can prevent material melt from rising along the inner wall surface and prevent splashed material melt from adhering to the upper portion of the container. Further, the pyrolytic boron nitride container can stabilize molecular beam epitaxial growth and improve the quality of epitaxial film.
信息查询